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The current trend of ceramic nanotechnology hasmotivated an ever-increasing need to achieveexquisite control over size, shape, and dimensionalconfinement of functional oxide architectures, in anequivalent manner realized for semiconductors.However, the unique nature of ceramics poses majorchallenges for most traditional nanofabricationtechnologies, putting the development of innovativeoxide nanopatterning schemes under the spotlight.This book discusses major challenges for ceramicnanofabrication and reviews patterning methods thatare suitable for this unique materials family. Stressis laid upon the variable pressure soft-electron beamlithography (VP-soft-eBL). Examples of ceramicnanopatterns prepared using VP-sof-eBL are presented,along with the strategy employed to control theirmicrostructure and morphology. The reported work ofbuilding and tailoring constrained ceramicnanostructures lays the groundwork for in-depthexploration in the rich phenomena related tospatial/dimensional confinement. This study should beuseful to professionals or any reader interested inceramic nanotechnology, nanopatterning andgeneral materials science fields.
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